P R O D U C T S
300-305nm Laser
Based on high-power, low-noise fiber amplification, as well as sum frequency and frequency doubling technologies, it enables high-power, narrow-linewidth laser output at any central wavelength within the range of 300-305 nm.
Features
- Narrow Linewidth: <40 kH
- Low Intensity Noise
- High Power
- Active Power Stability: <0.75% rms, 3 hrs
- Excellent Beam Quality (M² <1.3)
- Mode Hopping Free
- Resistant to high/low temperatures and vibration in operating environment
Application
- Interference Exposure
- Wafer Metrology
- Precision Measurement
Main parameters
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Specification |
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Partnumber |
FL-SF-XX-YY(1)-CW |
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Typical Wavelength |
302nm |
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Output Power |
0.1W |
0.5W |
1W |
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Linewidth (2) (100 us integration) |
<60kHz |
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Monitor Optical Output Power @604nm |
>5mW |
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Tuning Range (Never mode-hop) |
>300GHz |
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PZT Tuning Range |
>6GHz |
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PZT Tuning Bandwidth |
>5kHz |
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Current Tuning Range |
>1GHz |
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Current Tuning Bandwidth |
>1MHz |
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Power Stability(3 Hours RMS) |
<1% |
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Output Mode |
Spatial collimation output, diameter 0.8mm-1.2mm |
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Polarization Extinction Ratio |
>20dB,Linear, Vertical |
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Beam Quality |
TEM00,M²<1.3 |
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Cooling |
Air Cooling |
Water cooling |
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(1) WW: laser wavelength, XX: laser power, unit: W. For example, a 302nm laser with an output power of 1W: FL-SF-302-1-CW,
(2) Measurement of fiber delay by self-heterodyne beat frequency method
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Options |
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Wide Tuning Option |
By replacing the wide-tuning seed laser, ±0.5nm@302nm wide tuning is achieved |
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Other Parameters |
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Cooling |
Air Cooling |
Water cooling
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Temperature |
15-30℃ |
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Power Supply |
100V-220V, AC, 50Hz |
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