P R O D U C T S
313nm-325nm Narrow linewidth laser
Based on single frequency seed laser,low noise fiber amplifier and high efficiency frequency convert technique, Precilasers can provide narrow linewidth 313-325nm CW lasers，maximum output power is 2W,features with high frequency stability,long life and good beam quality.
Features
- Narrow Linewidth
- High Power
- Good Beam Quality
- Never Mod Hop
Application
- Precision Measurement
- Wafer Metrology
- Interference Lithography
Main parameters
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Specification |
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Partnumber |
FL-SF-X-Y-CW |
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Wavelength Range |
313nm-325nm, center wavelength can be selected |
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Linewidth(100 us integration ) |
<40kHz |
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Operational Mode |
CW |
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Output Power |
>300mW |
>1W |
>2W |
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Beam Diameter |
1±0.15 mm |
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Beam Waist Location |
output aperture±0.5m |
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Beam Divergence (full angle) |
<0.6mrad |
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Beam Circularity |
0.9-1.1 |
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Beam Pointing Stability (P-P) |
<50μrad@3h |
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Beam Quality |
TEM00，M²<1.2 |
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Polarization |
linear, Vertical, ±3°, >20dB |
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Power Stability |
<0.75% @3hours, RMS |
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Relative Intensity Noise |
<0.2%(RMS, 10Hz-10MHz integration) |
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Cooling |
Water cooling |
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Warm-Up Time |
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Cold Start |
<2 hours |
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Warm Start |
<15 minutes |
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Demension and Weight |
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Controller Size |
≤483mm x 520mm x 132mm |
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Laser Head Size |
≤390mm x 310mm x 130mm |
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Chiller Size |
≤58cm x 29cm x 52cm |
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Laser Head Weight |
≤18kg |
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Controller Weight |
≤20kg |
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Chiller Weight |
≤25kg |
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Cable Length Between Laser And Controller |
fiber length>1.5m |
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Environment and Power Supply |
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Operating Temperature（No condensing） |
15-35 ℃（water cooling） |
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Power Supply |
100V-240V, AC, 50/60Hz |
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Power Consumption |
<170W |
<200W |
<240W |
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Communication |
RS422 |
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Higher power, more wavelengths, customizable solutions
